Guangdong Kangshen Medical Technology Co.,Ltd

         

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Home  > INFO CENTER  > News  >  Solutions For Whole Set Of PVD Coating Machine Fault (Created originally by Foxin Vacuum, please indicate source if reprint)
Solutions For Whole Set Of PVD Coating Machine Fault (Created originally by Foxin Vacuum, please indicate source if reprint)
2018-05-31

Fault    Phenomenon

Cause

Solution

Rough    valve can not be opened

Compressed    air pressure is enough or not

Pressure    should be 0.4-0.6MPa

Electromagnetic    directional valve of rough valve is not working

Refer    to fault phenomenon 2

Overtravel-limit    switch of high vacuum valve is not compacted

Adjust    switch and upper cover plate to suitable place

Electromagnetic    directional valve is not working

No    actuation with electricity

Change    coil or whole valve

Working    room temperature is low

Temperature    should be higher than 5℃

Valve    body has block

Clean    valve body and add pump oil

Air    source pressure is not enough

Pressure    should be 0.4-0.6MPa

Fore    valve can not be opened

Deficient    air pressure

Refer    to fault phenomenon 2

Electromagnetic    directional valve is not working

Refer    to fault phenomenon 2

High    vacuum valve can not be opened

Overtravel-limit    switch of rough valve is not compacted

Adjust    switch and upper cover plate to suitable place

Gas    source pressure is not enough

Should    be 0.4-0.6MPa

Electromagnetic    directional valve

Refer    to fault phenomenon 2

Vacuum    degree is not enough(Can not reach vacuum meter setting value)

Compound    vacuum meter(working) setting value not less than 5Pa

Front    valve didn’t open

Open    front valve under certain condition

Roots    pump didn’t open

Vacuum    electric contact pressure gage didn’t touch

Pumping    air, make big round meter indicator to the left end

Time-delay    is not completed

Wait

Air    switch is not connected

Connect    switch if no issue

Diffusion    pump is not working

Heating    time is not enough

KT-400    is 1 hour; KT-600 is 80 minutes

Oil    pollution

Change    pump oil(Dalian NO.3)

Vacuum    rough pumping is not high

Vacuum    degree should be higher than 5Pa

Cooling    water is not unimpeded

Clean    pump cooling water path

Not    proper oil volume

Add    oil or release oil

Air    inflation is not working

Rough    valve and high vacuum valve overtravel-limit switch is not compacted

Adjust    switch and upper cover plate to suitable place

Electromagnetic    charging valve is not working

Change    coil or valve

Fan    didn’t open

Electro    connecting pressure gauge didn’t touch

Wait    for inflation pressure to 0.02MPa

Rough    valve and high vacuum valve overtravel-limit switch is not compacted

Adjust    switch and upper cover plate to suitable place

Air    switch is not connected

Connect    switch if no issue

Motor    is damaged

Fix    or change motor

Heating    current is not balanced confoundedly

Heating    voltage close to rated value, current is 0, heater band is broken

Use    molybdenum filament to connect or change heater band

Heater    band connected with wall

Use    ceramic parts to insulate

Mutual    inductor is broken, has voltage, no current

Change    mutual inductor

Ammeter    and voltmeter is broken

Change    meters

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